Titanium arsenide films from the atmospheric pressure chemical vapour deposition of tetrakisdimethylamidotitanium and tert-butylarsine
Keyword(s):
2006 ◽
Vol 2006
(6)
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pp. 1255-1259
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Keyword(s):
Keyword(s):
1998 ◽
Vol 264-268
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pp. 227-230
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Keyword(s):
Keyword(s):
1996 ◽
Vol 39
(1)
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pp. 48-51
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