Growth Mode and Kinetics of Atmospheric Pressure Chemical Vapour Deposition of β-SiC on Si(100) Substrate
1998 ◽
Vol 264-268
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pp. 227-230
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2001 ◽
Vol 11
(PR3)
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pp. Pr3-189-Pr3-196
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2006 ◽
Vol 2006
(6)
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pp. 1255-1259
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Keyword(s):
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