Effect of deposition pressure on the structural and optical properties of Ga2O3films obtained by thermal post-crystallization
Keyword(s):
β-Ga2O3films have been obtained by thermal annealing of amorphous thin films that were deposited by radio frequency magnetron sputtering.
2009 ◽
Vol 18
(5)
◽
pp. 394-401
2019 ◽
Vol 30
(20)
◽
pp. 18315-18327