Abstract
Solid-state nanopores (SSNPs) of on-demand shape and size can facilitate desired sensor performance. However, reproducible production of arrayed nanopores of predefined geometry is yet to demonstrate despite of numerous methods explored. Here, bowl-shape SSNPs combining unique properties of ultrathin membrane and tapering geometry are demonstrated. The bowl-SSNP upper opening is 100-120 nm in diameter, with the bottom opening reaching sub-5 nm. Numerical simulation reveals the formation of multiple electroosmotic vortexes (EOVs) originating from distributed surface charge around the pore-bowl. The EOVs determine, collaboratively with electrophoretic force, how nanoscale objects translocate the bowl-SSNPs. Exceptional rectification with higher frequencies, longer duration and larger amplitude is found when DNA strands translocate downwards from the upper large opening than upwards from the bottom smallest restriction. The rectification is a manifestation of the interplay between electrophoresis and electroosmosis. The resourceful silicon nanofabrication technology is ingeniously shown to enable innovative nanopore designs targeting unprecedented sensor applications.
Numerical simulation of surface charge inhibition performance on epoxy insulator under DC voltage by flexible coating strategy
