Solid state pulsed power systems for plasma source ion implantation
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1997 ◽
Vol 93
(2-3)
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pp. 247-253
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1996 ◽
Vol 29
(1)
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pp. 274-276
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2011 ◽
Vol 39
(11)
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pp. 3140-3143
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2000 ◽
Vol 128-129
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pp. 260-264
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1993 ◽
Vol 8
(5-6)
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pp. 89-91
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