Solid state pulsed power systems for plasma immersion ion implantation

2003 ◽  
Author(s):  
M.P.J. Gaudreau ◽  
J.A. Casey ◽  
M.A. Kempkes ◽  
J.M. Mulvaney ◽  
T.J. Hawkey
Keyword(s):  
Solid State ◽  
Ion Implantation ◽  
Power Systems ◽  
Pulsed Power ◽  
Plasma Immersion Ion Implantation

Solid-state modulators for plasma immersion ion implantation applications

1999 ◽  
Vol 17 (2) ◽  
pp. 888 ◽  
Author(s):  
Marcel P. J. Gaudreau, P. E. ◽  
Jeffrey A. Casey ◽  
Michael A. Kempkes ◽  
Timothy J. Hawkey ◽  
James M. Mulvaney
Keyword(s):  
Solid State ◽  
Ion Implantation ◽  
Plasma Immersion Ion Implantation

scholarly journals Solid-state pulsed power systems for the Next Linear Collider

2003 ◽  
Author(s):  
J.A. Casey ◽  
M.P.J. Gaudreau ◽  
I. Roth ◽  
T.A. Hawkey ◽  
J.M. Mulvaney ◽  
...  
Keyword(s):  
Solid State ◽  
Power Systems ◽  
Linear Collider ◽  
Pulsed Power
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