Structural and microstructural characterization of nanocrystalline silicon thin films obtained by radio-frequency magnetron sputtering

2005 ◽  
Vol 97 (3) ◽  
pp. 034307 ◽  
Author(s):  
M. Morales ◽  
Y. Leconte ◽  
R. Rizk ◽  
Daniel Chateigner
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Microstructural Characterization ◽  
Nanocrystalline Silicon ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Silicon Thin Films

Characterization of Ferroelectric SrBi2Ta2 O 9 Thin Films Deposited by a Radio Frequency Magnetron Sputtering Technique

1997 ◽  
Vol 144 (8) ◽  
pp. 2855-2858 ◽  
Author(s):  
Sang‐Shik Park ◽  
Cheol‐Hoon Yang ◽  
Soon‐Gil Yoon ◽  
Jun‐Hyung Ahn ◽  
Ho‐Gi Kim
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering

Characterization of the Ba(SnxTi1−x)O3 thin films prepared by radio frequency magnetron sputtering

2006 ◽  
Vol 433 (1-2) ◽  
pp. 279-285 ◽  
Author(s):  
Hong-Hsin Huang ◽  
Moo-Chin Wang ◽  
Chung-Yuan Chen ◽  
Nan-Chung Wu ◽  
Huey-Jiuan Lin
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering
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