Generalized Keller-Simmons formula for nonisothermal plasma-assisted sputtering depositions

2006 ◽  
Vol 89 (21) ◽  
pp. 211501 ◽  
Author(s):  
A. Palmero ◽  
H. Rudolph ◽  
F. H. P. M. Habraken
Keyword(s):  
1970 ◽  
Vol 4 (15) ◽  
pp. 685-688 ◽  
Author(s):  
S. Takamura ◽  
S. Aihara

1993 ◽  
Vol 32 (8) ◽  
pp. 1465-1474 ◽  
Author(s):  
S. Chakraborty ◽  
A. Roy Chowdhury ◽  
S. N. Paul

2011 ◽  
Vol 18 (2) ◽  
pp. 023108
Author(s):  
Deepak Tripathi ◽  
R. Uma ◽  
V. K. Tripathi

1990 ◽  
Vol 42 (4) ◽  
pp. 469-472 ◽  
Author(s):  
E B Kleiman ◽  
I M Ojringel ◽  
E G Stupko

1988 ◽  
Vol 31 (1) ◽  
pp. 90-94 ◽  
Author(s):  
Nam C. Lee ◽  
George K. Parks

Sign in / Sign up

Export Citation Format

Share Document