Efficient negative ion production in rf plasmas using a mesh grid bias method
2008 ◽
Vol 79
(2)
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pp. 02A502
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2006 ◽
Vol 77
(3)
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pp. 03A505
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2004 ◽
Vol 75
(5)
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pp. 1732-1734
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2000 ◽
Vol 71
(2)
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pp. 883-886
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Keyword(s):
1993 ◽
Vol 64
(6)
◽
pp. 1385-1393
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1983 ◽
Vol 50
(1-2)
◽
pp. 1-33
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Keyword(s):