On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses

2009 ◽  
Vol 106 (10) ◽  
pp. 104910 ◽  
Author(s):  
Jörn Bonse ◽  
Arkadi Rosenfeld ◽  
Jörg Krüger
Author(s):  
А.В. Колчин ◽  
Д.В. Шулейко ◽  
А.В. Павликов ◽  
С.В. Заботнов ◽  
Л.А. Головань ◽  
...  

Femtosecond laser annealing of thin-film multilayered structures based on amorphous silicon and germanium were studied. The original samples were synthesized via plasma-enhanced deposition on glass substrate. Scanning electron microscopy revealed formation of periodic surface structures in the irradiated films. Raman spectra analysis revealed crystallization of amorphous germanium as a result of femtosecond laser pulses action, as well as fluence-dependent mixture of the germanium and silicon layers at absence of crystallization of the amorphous silicon layers.


Nanophotonics ◽  
2022 ◽  
Vol 0 (0) ◽  
Author(s):  
Pavel N. Terekhin ◽  
Jens Oltmanns ◽  
Andreas Blumenstein ◽  
Dmitry S. Ivanov ◽  
Frederick Kleinwort ◽  
...  

Abstract Understanding the mechanisms and controlling the possibilities of surface nanostructuring is of crucial interest for both fundamental science and application perspectives. Here, we report a direct experimental observation of laser-induced periodic surface structures (LIPSS) formed near a predesigned gold step edge following single-pulse femtosecond laser irradiation. Simulation results based on a hybrid atomistic-continuum model fully support the experimental observations. We experimentally detect nanosized surface features with a periodicity of ∼300 nm and heights of a few tens of nanometers. We identify two key components of single-pulse LIPSS formation: excitation of surface plasmon polaritons and material reorganization. Our results lay a solid foundation toward simple and efficient usage of light for innovative material processing technologies.


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