Temperature dependent properties of silicon containing diamondlike carbon films prepared by plasma source ion implantation

Journal of Applied Physics ◽

10.1063/1.3394002 ◽

2010 ◽

Vol 107 (8) ◽

pp. 083307 ◽

Author(s):

R. Hatada ◽

S. Flege ◽

K. Baba ◽

W. Ensinger ◽

H.-J. Kleebe ◽

...

Keyword(s):

Ion Implantation ◽

Plasma Source ◽

Carbon Films ◽

Temperature Dependent ◽

Diamondlike Carbon ◽

Plasma Source Ion Implantation ◽

Temperature Dependent Properties

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Development of an energetic ion assisted mixing and deposition process for TiNx and diamondlike carbon films, using a co-axial geometry in plasma source ion implantation

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580842 ◽

1997 ◽

Vol 15 (6) ◽

pp. 2875-2879 ◽

Author(s):

Shamim M. Malik ◽

R. P. Fetherston ◽

J. R. Conrad

Keyword(s):

Ion Implantation ◽

Plasma Source ◽

Deposition Process ◽

Carbon Films ◽

Diamondlike Carbon ◽

Plasma Source Ion Implantation

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Deposition of Diamond-Like Carbon Films on Inner Wall Surfaces of Millimeter-Size-Diameter Steel Tubes by Plasma Source Ion Implantation

IEEE Transactions on Plasma Science ◽

10.1109/tps.2011.2168829 ◽

2011 ◽

Vol 39 (11) ◽

pp. 3140-3143 ◽

Author(s):

K. Baba ◽

R. Hatada ◽

S. Flege ◽

W. Ensinger

Keyword(s):

Ion Implantation ◽

Plasma Source ◽

Carbon Films ◽

Diamond Like Carbon ◽

Steel Tubes ◽

Plasma Source Ion Implantation

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Deposition of diamond-like carbon films using plasma source ion implantation with pulsed plasmas

Surface and Coatings Technology ◽

10.1016/s0257-8972(00)00588-0 ◽

2000 ◽

Vol 128-129 ◽

pp. 260-264 ◽

Author(s):

S Miyagawa ◽

S Nakao ◽

K Saitoh ◽

K Baba ◽

Y Miyagawa

Keyword(s):

Ion Implantation ◽

Plasma Source ◽

Carbon Films ◽

Diamond Like Carbon ◽

Pulsed Plasmas ◽

Plasma Source Ion Implantation

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Preparation of Ag-containing diamond-like carbon films on the interior surface of tubes by a combined method of plasma source ion implantation and DC sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2014.03.071 ◽

2014 ◽

Vol 310 ◽

pp. 257-261 ◽

Author(s):

R. Hatada ◽

S. Flege ◽

A. Bobrich ◽

W. Ensinger ◽

C. Dietz ◽

...

Keyword(s):

Ion Implantation ◽

Plasma Source ◽

Carbon Films ◽

Diamond Like Carbon ◽

Combined Method ◽

Interior Surface ◽

Dc Sputtering ◽

Plasma Source Ion Implantation

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Preparation and properties of W-containing diamond-like carbon films by magnetron plasma source ion implantation

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2006.02.086 ◽

2007 ◽

Vol 201 (19-20) ◽

pp. 8362-8365 ◽

Author(s):

K. Baba ◽

R. Hatada ◽

Y. Tanaka

Keyword(s):

Ion Implantation ◽

Plasma Source ◽

Carbon Films ◽

Diamond Like Carbon ◽

Plasma Source Ion Implantation

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Deposition of diamond-like carbon films by plasma source ion implantation with superposed pulse

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(03)00841-3 ◽

2003 ◽

Vol 206 ◽

pp. 708-711 ◽

Author(s):

K. Baba ◽

R. Hatada

Keyword(s):

Ion Implantation ◽

Plasma Source ◽

Carbon Films ◽

Diamond Like Carbon ◽

Plasma Source Ion Implantation

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Mechanical and electrical properties of diamond-like carbon films deposited by plasma source ion implantation

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2009.01.105 ◽

2009 ◽

Vol 267 (8-9) ◽

pp. 1688-1691 ◽

Author(s):

K. Baba ◽

R. Hatada ◽

S. Flege ◽

W. Ensinger

Keyword(s):

Electrical Properties ◽

Ion Implantation ◽

Plasma Source ◽

Carbon Films ◽

Diamond Like Carbon ◽

Mechanical And Electrical Properties ◽

Plasma Source Ion Implantation

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Preparation of hydrophobic diamond like carbon films by plasma source ion implantation

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(98)00745-9 ◽

1999 ◽

Vol 148 (1-4) ◽

pp. 655-658 ◽

Author(s):

R Hatada ◽

K Baba

Keyword(s):

Ion Implantation ◽

Plasma Source ◽

Carbon Films ◽

Diamond Like Carbon ◽

Plasma Source Ion Implantation

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Deposition of diamond-like carbon films on inner wall of sub-millimeter diameter steel tube by plasma source ion implantation

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(03)00838-3 ◽

2003 ◽

Vol 206 ◽

pp. 704-707 ◽

Author(s):

K. Baba ◽

R. Hatada

Keyword(s):

Ion Implantation ◽

Plasma Source ◽

Carbon Films ◽

Diamond Like Carbon ◽

Plasma Source Ion Implantation

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Structure and tribology properties of diamond-like carbon films prepared by microwave electron cyclotron resonance plasma source ion implantation

Acta Physica Sinica ◽

10.7498/aps.54.3241 ◽

2005 ◽

Vol 54 (7) ◽

pp. 3241

Author(s):

Gao Peng ◽

Xu Jun ◽

Deng Xin-Lu ◽

Wang De-He ◽

Dong Chuang

Keyword(s):

Ion Implantation ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Electron Cyclotron Resonance Plasma ◽

Plasma Source Ion Implantation ◽

Resonance Plasma

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