Low‐temperature surface cleaning method using low‐energy reactive ionized species

1989 ◽  
Vol 65 (2) ◽  
pp. 775-781 ◽  
Author(s):  
Hiroshi Yamada
Keyword(s):  
Low Temperature ◽  
Surface Cleaning ◽  
Low Energy ◽  
Cleaning Method ◽  
Temperature Surface

Low-Temperature Surface Cleaning of Si and Successive Plasma-Assisted Epitaxial Growth of GaAs

1987 ◽  
Vol 26 (Part 2, No. 10) ◽  
pp. L1576-L1578 ◽  
Author(s):  
Qing Zhu Gao ◽  
Takashi Hariu ◽  
Shoichi Ono
Keyword(s):  
Low Temperature ◽  
Epitaxial Growth ◽  
Surface Cleaning ◽  
Temperature Surface

Low Temperature Surface Cleaning of InP by Irradiation of Atomic Hydrogen

1993 ◽  
Vol 32 (Part 2, No. 2B) ◽  
pp. L287-L289 ◽  
Author(s):  
Yong Jin Chun ◽  
Takeyoshi Sugaya ◽  
Yoshitaka Okada ◽  
Mitsuo Kawabe
Keyword(s):  
Low Temperature ◽  
Atomic Hydrogen ◽  
Surface Cleaning ◽  
Temperature Surface

Investigation on GaAs(001) surface treated by As-free high temperature surface cleaning method

2007 ◽  
Vol 301-302 ◽  
pp. 26-29 ◽  
Author(s):  
N. Isomura ◽  
S. Tsukamoto ◽  
K. Iizuka ◽  
Y. Arakawa
Keyword(s):  
High Temperature ◽  
Surface Cleaning ◽  
Cleaning Method ◽  
Temperature Surface

Low-Temperature Surface Cleaning of GaAs Using Trisdimethylaminoarsine

1994 ◽  
Vol 33 (Part 2, No. 12B) ◽  
pp. L1744-L1747 ◽  
Author(s):  
Yasuhiko Nomura ◽  
Shigeo Goto ◽  
Yoshitaka Morishita
Keyword(s):  
Low Temperature ◽  
Surface Cleaning ◽  
Temperature Surface

Two-step-heating sequence in arsenic-free high-temperature surface cleaning method for GaAs–AlGaAs MBE

2001 ◽  
Vol 227-228 ◽  
pp. 41-45 ◽  
Author(s):  
Kanji Iizuka ◽  
Yasuo Sakamaki ◽  
Toshimasa Suzuki ◽  
Hiroshi Okamoto
Keyword(s):  
High Temperature ◽  
Surface Cleaning ◽  
Cleaning Method ◽  
Step Heating ◽  
Temperature Surface

Effects of Low-Temperature Surface Cleaning Using Ecr Hydrogen Plasma

1993 ◽  
Vol 315 ◽  
Author(s):  
C. W. Nam ◽  
S. Ashok ◽  
W. Tsai ◽  
M. E. Day
Keyword(s):  
Low Temperature ◽  
Hydrogen Plasma ◽  
Surface Cleaning ◽  
Temperature Surface
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