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Evaluation of crystalline quality of heteroepitaxial yttria‐stabilized zirconia films on silicon by means of ion beam channeling
Journal of Applied Physics
◽
10.1063/1.344457
◽
1989
◽
Vol 66
(2)
◽
pp. 616-618
◽
Cited By ~ 12
Author(s):
Hirofumi Fukumoto
◽
Takeshi Imura
◽
Yukio Osaka
◽
Fumitaka Nishiyama
Keyword(s):
Ion Beam
◽
Yttria Stabilized Zirconia
◽
Crystalline Quality
◽
Stabilized Zirconia
◽
Zirconia Films
Download Full-text
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References
Study on the growth of biaxially aligned yttria-stabilized zirconia films during ion beam assisted deposition
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
◽
10.1116/1.580943
◽
1997
◽
Vol 15
(5)
◽
pp. 2687-2692
◽
Cited By ~ 6
Author(s):
Y. J. Mao
◽
C. X. Ren
◽
J. Yuan
◽
F. Zhang
◽
X. H. Liu
◽
...
Keyword(s):
Ion Beam
◽
Yttria Stabilized Zirconia
◽
Stabilized Zirconia
◽
Ion Beam Assisted Deposition
◽
Zirconia Films
Download Full-text
An empirical growth model for the biaxially aligned yttria stabilized zirconia films deposited by ion beam assisted deposition
Thin Solid Films
◽
10.1016/s0040-6090(03)00458-9
◽
2003
◽
Vol 434
(1-2)
◽
pp. 82-85
◽
Cited By ~ 4
Author(s):
S. Gnanarajan
Keyword(s):
Growth Model
◽
Ion Beam
◽
Yttria Stabilized Zirconia
◽
Stabilized Zirconia
◽
Ion Beam Assisted Deposition
◽
Empirical Growth
◽
Zirconia Films
Download Full-text
The development of biaxial alignment in yttria-stabilized zirconia films fabricated by ion beam assisted deposition
Journal of Electronic Materials
◽
10.1007/bf02666171
◽
1996
◽
Vol 25
(1)
◽
pp. 35-42
◽
Cited By ~ 14
Author(s):
Kevin G. Ressler
◽
Neville Sonnenberg
◽
Michael J. Cima
Keyword(s):
Ion Beam
◽
Yttria Stabilized Zirconia
◽
Stabilized Zirconia
◽
Ion Beam Assisted Deposition
◽
Biaxial Alignment
◽
Zirconia Films
Download Full-text
Low energy ion beam assisted deposition of biaxially aligned yttria stabilized zirconia films on polycrystalline Ni–Cr alloy
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
◽
10.1016/s0168-583x(97)00655-1
◽
1998
◽
Vol 135
(1-4)
◽
pp. 492-500
◽
Cited By ~ 5
Author(s):
Y.J Mao
◽
B.Y Jiang
◽
C.X Ren
◽
X.H Liu
◽
S.C Zou
Keyword(s):
Ion Beam
◽
Low Energy
◽
Yttria Stabilized Zirconia
◽
Stabilized Zirconia
◽
Ion Beam Assisted Deposition
◽
Zirconia Films
Download Full-text
Improving crystalline quality of polycrystalline silicon thin films crystallized on yttria-stabilized zirconia crystallization-induction layers by the two-step irradiation method of pulsed laser annealing
Japanese Journal of Applied Physics
◽
10.7567/jjap.54.03ca01
◽
2015
◽
Vol 54
(3S)
◽
pp. 03CA01
◽
Cited By ~ 1
Author(s):
Mai Thi Kieu Lien
◽
Susumu Horita
Keyword(s):
Thin Films
◽
Polycrystalline Silicon
◽
Laser Annealing
◽
Pulsed Laser
◽
Yttria Stabilized Zirconia
◽
Crystalline Quality
◽
Stabilized Zirconia
◽
Silicon Thin Films
◽
Pulsed Laser Annealing
Download Full-text
Enhancement of the crystalline quality of reactively sputtered yttria-stabilized zirconia by oxidation of the metallic target surface
Thin Solid Films
◽
10.1016/j.tsf.2009.03.035
◽
2009
◽
Vol 517
(20)
◽
pp. 5830-5836
◽
Cited By ~ 7
Author(s):
Sukreen Hana
◽
Kensuke Nishioka
◽
Susumu Horita
Keyword(s):
Target Surface
◽
Yttria Stabilized Zirconia
◽
Crystalline Quality
◽
Stabilized Zirconia
◽
Metallic Target
Download Full-text
In-plane texture study of the yttria-stabilized zirconia films fabricated by ion-beam-assisted deposition
Proceedings of 11th International Conference on Ion Implantation Technology
◽
10.1109/iit.1996.586533
◽
2002
◽
Author(s):
Jun Yuan
◽
Genqing Yang
◽
Yingjun Mao
◽
Xingcong Ren
◽
Xianghuai Liu
◽
...
Keyword(s):
Ion Beam
◽
Yttria Stabilized Zirconia
◽
Stabilized Zirconia
◽
Ion Beam Assisted Deposition
◽
Zirconia Films
Download Full-text
Epitaxial growth of yttria‐stabilized zirconia films on silicon by ultrahigh vacuum ion beam sputter deposition
Applied Physics Letters
◽
10.1063/1.100431
◽
1988
◽
Vol 53
(16)
◽
pp. 1506-1508
◽
Cited By ~ 56
Author(s):
P. Legagneux
◽
G. Garry
◽
D. Dieumegard
◽
C. Schwebel
◽
C. Pellet
◽
...
Keyword(s):
Epitaxial Growth
◽
Ion Beam
◽
Ultrahigh Vacuum
◽
Sputter Deposition
◽
Yttria Stabilized Zirconia
◽
Stabilized Zirconia
◽
Ion Beam Sputter Deposition
◽
Zirconia Films
Download Full-text
Channel and temperature effect on the growth of yttria-stabilized zirconia films fabricated by ion-beam-assisted deposition
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
◽
10.1016/s0168-583x(97)00017-7
◽
1997
◽
Vol 127-128
◽
pp. 837-840
◽
Cited By ~ 1
Author(s):
Jun Yuan
◽
Genqing Yang
◽
Congxin Ren
◽
Xianghuai Liu
◽
Shichang Zou
Keyword(s):
Temperature Effect
◽
Ion Beam
◽
Yttria Stabilized Zirconia
◽
Stabilized Zirconia
◽
Ion Beam Assisted Deposition
◽
Zirconia Films
Download Full-text
Improvement of the crystalline quality of an yttria-stabilized zirconia film on silicon by a new deposition process in reactive sputtering
Thin Solid Films
◽
10.1016/0040-6090(93)90402-b
◽
1993
◽
Vol 229
(1)
◽
pp. 17-23
◽
Cited By ~ 25
Author(s):
Susumu Horita
◽
Toshiyuki Tajima
◽
Masakazu Murakawa
◽
Takaharu Fujiyama
◽
Tomonobu Hata
Keyword(s):
Reactive Sputtering
◽
Deposition Process
◽
Yttria Stabilized Zirconia
◽
Crystalline Quality
◽
Stabilized Zirconia
◽
Zirconia Film
Download Full-text
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