Electron paramagnetic resonance investigation of charge trapping centers in amorphous silicon nitride films

1993 ◽  
Vol 74 (6) ◽  
pp. 4034-4046 ◽  
Author(s):  
W. L. Warren ◽  
J. Kanicki ◽  
J. Robertson ◽  
E. H. Poindexter ◽  
P. J. McWhorter
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