Electron energy flux control using dual power in side-type inductively coupled plasma
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2003 ◽
Vol 20
(9)
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pp. 1527-1529
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2012 ◽
Vol 7
(01)
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pp. C01049-C01049
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2014 ◽
Vol 54
(1S)
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pp. 01AB02
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1998 ◽
Vol 81
(2)
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pp. 369-372
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