Study of nitrogen implanted amorphous hydrogenated carbon thin films by variable-energy positron annihilation spectroscopy

1997 ◽  
Vol 81 (5) ◽  
pp. 2451-2453 ◽  
Author(s):  
F. L. Freire ◽  
D. F. Franceschini ◽  
R. S. Brusa ◽  
G. R. Karwasz ◽  
G. Mariotto ◽  
...  
2002 ◽  
Vol 751 ◽  
Author(s):  
Kenji Ito ◽  
Yoshinori Kobayashi ◽  
Runsheng Yu ◽  
Kouichi Hirata ◽  
Hisashi Togashi ◽  
...  

ABSTRACTApplication of porous silicon oxide thin films to nanotechnology is under intensive investigation. Introducing a large amount of nano pores into a silicon oxide matrix is important to develop low-k dielectrics for future ultra-large-scale integrated circuits (ULSI). In this work, we applied variable-energy positron annihilation to the characterization of porous silicon oxide thin films fabricated on silicon wafers by sputtering and spincoating. It was found that the sputtered film has higher open pore connectivity than that of the spincoated low-k film.


2001 ◽  
Vol 363-365 ◽  
pp. 478-480 ◽  
Author(s):  
Y.F. Hu ◽  
Y.Y. Shan ◽  
C.D. Beling ◽  
S. Fung ◽  
M.H. Xie ◽  
...  

2018 ◽  
Vol 125 (5) ◽  
pp. 731-734 ◽  
Author(s):  
D. Khmelevskaya ◽  
D. P. Shcherbinin ◽  
E. A. Konshina ◽  
M. M. Abboud ◽  
A. Dubavik ◽  
...  

2020 ◽  
Vol 137 (2) ◽  
pp. 205-208 ◽  
Author(s):  
S.W.H. Eijt ◽  
T.W.H. de Krom ◽  
D. Chaykina ◽  
H. Schut ◽  
G. Colombi ◽  
...  

1994 ◽  
Vol 253 (1-2) ◽  
pp. 57-61 ◽  
Author(s):  
William A. McGahan ◽  
Tim Makovicka ◽  
Jeffrey Hale ◽  
John A. Woollam

2009 ◽  
Vol 105 (5) ◽  
pp. 053517
Author(s):  
D. E. Blakie ◽  
O. H. Y. Zalloum ◽  
J. Wojcik ◽  
E. A. Irving ◽  
A. P. Knights ◽  
...  

2004 ◽  
Vol 19 (23) ◽  
pp. 3951-3959 ◽  
Author(s):  
CORINE BAS ◽  
N. DOMINIQUE ALBÉROLA ◽  
MARIE-FRANCE BARTHE ◽  
JÉRÉMIE De BAERDEMAEKER ◽  
CHARLES DAUWE

A series of dense copolyimide membranes was characterized using positron annihilation spectroscopy. The positron annihilation lifetime spectroscopy performed on film with a classical positron source gives informations on the positronium fraction formed and also on the hole size within the film. The Doppler broadening spectra (DBS) of the gamma annihilation rays coupled with a variable energy positron beam allow the microstructural analyses as a function of the film depth. Experimental data were also linked to the chemical structure of the polyimides. It was found that the presence of the fluorine atoms strongly affects the positron annihilitation process and especially the DBS responses.


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