Surface plasma source with saddle antenna radio frequency plasma generator
2012 ◽
Vol 83
(2)
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pp. 02A712
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Keyword(s):
1994 ◽
Vol 138
(1-4)
◽
pp. 443-447
◽
Keyword(s):
Keyword(s):
2020 ◽
Keyword(s):
2020 ◽
Keyword(s):
2020 ◽
Keyword(s):
2020 ◽
Keyword(s):
2010 ◽
Vol 19
(4)
◽
pp. 045012
◽
Keyword(s):
2020 ◽
Keyword(s):