INVESTIGATION OF THE NITRIDATION OF Al2O3 (0001) SUBSTRATES BY A NITROGEN RADIO FREQUENCY PLASMA SOURCE
1994 ◽
Vol 138
(1-4)
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pp. 443-447
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2010 ◽
Vol 19
(4)
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pp. 045012
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2012 ◽
Vol 83
(2)
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pp. 02A712
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2020 ◽
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2020 ◽