Impact of surface periodic grating on film bulk acoustic resonator structures to spurious transverse resonances
2007 ◽
Vol 400
(1-2)
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pp. 38-41
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2005 ◽
Vol 117
(1)
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pp. 62-70
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2005 ◽
Vol 69
(1)
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pp. 323-332
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Keyword(s):
2010 ◽
Vol 56
(2)
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pp. 805-810
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