Interface/border trap characterization of Al2O3/AlN/GaN metal-oxide-semiconductor structures with an AlN interfacial layer

Shenghou Liu; Shu Yang; Zhikai Tang; Qimeng Jiang; Cheng Liu; Maojun Wang; Bo Shen; Kevin J. Chen

doi:10.1063/1.4907861

Interface/border trap characterization of Al2O3/AlN/GaN metal-oxide-semiconductor structures with an AlN interfacial layer

Applied Physics Letters ◽

10.1063/1.4907861 ◽

2015 ◽

Vol 106 (5) ◽

pp. 051605 ◽

Cited By ~ 52

Author(s):

Shenghou Liu ◽

Shu Yang ◽

Zhikai Tang ◽

Qimeng Jiang ◽

Cheng Liu ◽

...

Keyword(s):

Metal Oxide ◽

Interfacial Layer ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Semiconductor Structures

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Formation and characterization of nanometer scale metal-oxide-semiconductor structures on GaAs using low-temperature atomic layer deposition

Applied Physics Letters ◽

10.1063/1.1954902 ◽

2005 ◽

Vol 87 (1) ◽

pp. 013501 ◽

Cited By ~ 17

Author(s):

P. D. Ye ◽

G. D. Wilk ◽

E. E. Tois ◽

Jian Jim Wang

Keyword(s):

Low Temperature ◽

Atomic Layer Deposition ◽

Metal Oxide ◽

Atomic Layer ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Nanometer Scale ◽

Semiconductor Structures ◽

Layer Deposition

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Characterization of Si‐SiO2interface traps inp‐metal‐oxide‐semiconductor structures with thin oxides by conductance technique

Journal of Applied Physics ◽

10.1063/1.339091 ◽

1987 ◽

Vol 62 (10) ◽

pp. 4204-4211 ◽

Cited By ~ 77

Author(s):

K. K. Hung ◽

Y. C. Cheng

Keyword(s):

Metal Oxide ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Semiconductor Structures ◽

Conductance Technique

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Capacitance-Voltage Characterization of Atomic-Layer-Deposited Al2O3/InGaAs and Al2O3/GaAs Metal-Oxide-Semiconductor Structures

ECS Transactions ◽

10.1149/1.2355699 ◽

2019 ◽

Vol 3 (3) ◽

pp. 59-69 ◽

Cited By ~ 4

Author(s):

Peide (Peter) Ye ◽

Yi Xuan ◽

H.C. Lin

Keyword(s):

Metal Oxide ◽

Atomic Layer ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Semiconductor Structures ◽

Capacitance Voltage

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Efficient fabrication and characterization of cobalt nanoparticles embedded in metal∕oxide∕semiconductor structures for the application of nonvolatile memory

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.2366612 ◽

2006 ◽

Vol 24 (6) ◽

pp. 2636 ◽

Cited By ~ 1

Author(s):

Jung Yup Yang ◽

Kap Soo Yoon ◽

Won Joon Choi ◽

Young Ho Do ◽

Ju Hyung Kim ◽

...

Keyword(s):

Metal Oxide ◽

Nonvolatile Memory ◽

Cobalt Nanoparticles ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Semiconductor Structures ◽

Fabrication And Characterization

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Characterization of ultrathin metal–oxide–semiconductor structures using coupled current and capacitance–voltage models based on quantum calculation

Journal of Applied Physics ◽

10.1063/1.1506000 ◽

2002 ◽

Vol 92 (8) ◽

pp. 4449-4458 ◽

Cited By ~ 19

Author(s):

O. Simonetti ◽

T. Maurel ◽

M. Jourdain

Keyword(s):

Metal Oxide ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Quantum Calculation ◽

Semiconductor Structures ◽

Capacitance Voltage

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Processing and Electrical Characterization of Metal-Oxide-Semiconductor Structures Prepared by DBSA-Doped TiO2 Nanoparticles

Current Nanoscience ◽

10.2174/157341313805117884 ◽

2013 ◽

Vol 9 (1) ◽

pp. 39-45

Author(s):

Savas Sonmezoglu

Keyword(s):

Metal Oxide ◽

Tio2 Nanoparticles ◽

Electrical Characterization ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Doped Tio2 ◽

Semiconductor Structures

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Processing and Electrical Characterization of Metal-Oxide-Semiconductor Structures Prepared by DBSA-Doped TiO2 Nanoparticles

Current Nanoscience ◽

10.2174/1573413711309010009 ◽

2013 ◽

Vol 9 (1) ◽

pp. 39-45

Author(s):

Savas Sonmezoglu

Keyword(s):

Metal Oxide ◽

Tio2 Nanoparticles ◽

Electrical Characterization ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Doped Tio2 ◽

Semiconductor Structures

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Characterization of Surface Plasmons on Metal-oxide-semiconductor Structures

Journal of Modern Optics ◽

10.1080/09500349114551751 ◽

1991 ◽

Vol 38 (8) ◽

pp. 1593-1598 ◽

Cited By ~ 7

Author(s):

I.R. Tamm ◽

P. Dawson ◽

M.P. Connolly ◽

S.H. Raza ◽

H.S. Gamble

Keyword(s):

Metal Oxide ◽

Surface Plasmons ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Semiconductor Structures

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Electrical Characterization of 6H‐SiC Metal Oxide Semiconductor Structures at High Temperature

Journal of The Electrochemical Society ◽

10.1149/1.1838250 ◽

1998 ◽

Vol 145 (1) ◽

pp. 299-302 ◽

Cited By ~ 3

Author(s):

Nitya N. Singh ◽

Andrew Rys

Keyword(s):

High Temperature ◽

Metal Oxide ◽

Electrical Characterization ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Semiconductor Structures

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Capacitance–voltage characterization of surface-treated Al2O3/GaN metal–oxide–semiconductor structures

Microelectronic Engineering ◽

10.1016/j.mee.2013.03.108 ◽

2013 ◽

Vol 109 ◽

pp. 10-12 ◽

Cited By ~ 4

Author(s):

Sung-Bum Bae ◽

Ki-Won Kim ◽

Yong Soo Lee ◽

Jung-Hee Lee ◽

Youngho Bae ◽

...

Keyword(s):

Metal Oxide ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Semiconductor Structures ◽

Capacitance Voltage

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