Deposition of dielectric films on silicon using a fore-vacuum plasma electron source

2016 ◽  
Vol 87 (6) ◽  
pp. 063302 ◽  
Author(s):  
D. B. Zolotukhin ◽  
E. M. Oks ◽  
A. V. Tyunkov ◽  
Yu. G. Yushkov
Keyword(s):  
Plasma Electron ◽  
Electron Source ◽  
Dielectric Films ◽  
Vacuum Plasma ◽  
Plasma Electron Source

A Fore-Vacuum Plasma Electron Source of a Focused Electron Beam

2019 ◽  
Vol 83 (11) ◽  
pp. 1402-1406 ◽  
Author(s):  
I. Yu. Bakeev ◽  
A. S. Klimov ◽  
E. M. Oks ◽  
A. A. Zenin
Keyword(s):  
Electron Beam ◽  
Plasma Electron ◽  
Electron Source ◽  
Vacuum Plasma ◽  
Plasma Electron Source

Electron beam welding of ceramic to metal using fore-vacuum plasma electron source

2012 ◽  
Vol 3 (5) ◽  
pp. 446-449 ◽  
Author(s):  
A. K. Goreev ◽  
V. A. Burdovitsin ◽  
A. S. Klimov ◽  
E. M. Oks
Keyword(s):  
Electron Beam ◽  
Electron Beam Welding ◽  
Plasma Electron ◽  
Electron Source ◽  
Vacuum Plasma ◽  
Plasma Electron Source

Ribbon electron beam formation by a forevacuum plasma electron source

2016 ◽  
Vol 42 (1) ◽  
pp. 96-99 ◽  
Author(s):  
A. S. Klimov ◽  
V. A. Burdovitsin ◽  
A. A. Grishkov ◽  
E. M. Oks ◽  
A. A. Zenin ◽  
...  
Keyword(s):  
Electron Beam ◽  
Plasma Electron ◽  
Electron Source ◽  
Plasma Electron Source ◽  
Beam Formation

A forevacuum pulse arc-discharge-based plasma electron source

2013 ◽  
Vol 56 (6) ◽  
pp. 680-683 ◽  
Author(s):  
A. V. Kazakov ◽  
V. A. Burdovitsin ◽  
A. V. Medovnik ◽  
E. M. Oks
Keyword(s):  
Arc Discharge ◽  
Plasma Electron ◽  
Electron Source ◽  
Plasma Electron Source

A plasma electron source for generating beam plasma at low gas pressures

Vacuum ◽  
2017 ◽  
Vol 143 ◽  
pp. 407-411 ◽  
Author(s):  
Jianping Xu ◽  
Xiubo Tian ◽  
Chunzhi Gong ◽  
Chunwei Li ◽  
Mingzhong Wu ◽  
...  
Keyword(s):  
Plasma Electron ◽  
Electron Source ◽  
Plasma Electron Source ◽  
Beam Plasma ◽  
Gas Pressures
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