Sensitivity study of multilayer thin-film bulk acoustic resonator for mass sensor application

2016 ◽  
Vol 120 (15) ◽  
pp. 154503 ◽  
Author(s):  
Haiqiang Liu ◽  
Fang Li ◽  
Lifeng Qin ◽  
Qing-Ming Wang
Keyword(s):  
Thin Film ◽  
Sensitivity Study ◽  
Acoustic Resonator ◽  
Multilayer Thin Film ◽  
Mass Sensor ◽  
Sensor Application ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk

scholarly journals Processing Chip for Thin Film Bulk Acoustic Resonator Mass Sensor

2012 ◽  
Vol 2012 ◽  
pp. 1-5
Author(s):  
Pengcheng Jin ◽  
Shurong Dong ◽  
Hao Jin ◽  
Mengjun Wu
Keyword(s):  
Thin Film ◽  
Acoustic Resonator ◽  
Mass Sensor ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk

Multifunctional ZnO-Based Thin-Film Bulk Acoustic Resonator for Biosensors

2009 ◽  
Vol 38 (8) ◽  
pp. 1605-1611 ◽  
Author(s):  
Ying Chen ◽  
Pavel I. Reyes ◽  
Ziqing Duan ◽  
Gaurav Saraf ◽  
Richard Wittstruck ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Resonator ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk
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