scholarly journals Effect of a magnetic filter on the formation and deposition of high‐Z impurities in a multicusp ion source

1982 ◽  
Vol 41 (6) ◽  
pp. 517-519 ◽  
Author(s):  
K. W. Ehlers ◽  
K. N. Leung ◽  
P. A. Pincosy ◽  
M. C. Vella
Keyword(s):  
Ion Source ◽  
Magnetic Filter ◽  
Multicusp Ion Source

scholarly journals Effect of magnetic filter in a volume production multicusp ion source

2018 ◽  
Author(s):  
Anand George ◽  
Stephane Melanson ◽  
Dave Potkins ◽  
Morgan Dehnel ◽  
Hamish McDonald ◽  
...  
Keyword(s):  
Ion Source ◽  
Magnetic Filter ◽  
Multicusp Ion Source ◽  
Volume Production

scholarly journals Increasing the efficiency of a multicusp ion source

1982 ◽  
Vol 53 (9) ◽  
pp. 1429-1433 ◽  
Author(s):  
K. W. Ehlers ◽  
K. N. Leung
Keyword(s):  
Ion Source ◽  
Multicusp Ion Source

scholarly journals H−formation process in a multicusp ion source

1987 ◽  
Vol 59 (7) ◽  
pp. 787-790 ◽  
Author(s):  
K. N. Leung ◽  
W. B. Kunkel
Keyword(s):  
Formation Process ◽  
Ion Source ◽  
Multicusp Ion Source

Theoretical discussion for electron-density distribution in multicusp ion source

2011 ◽  
Vol 98 (12) ◽  
pp. 121501 ◽  
Author(s):  
Hualin Zhan ◽  
Chundong Hu ◽  
Yahong Xie ◽  
Bin Wu ◽  
Jinfang Wang ◽  
...  
Keyword(s):  
Density Distribution ◽  
Electron Density ◽  
Electron Density Distribution ◽  
Ion Source ◽  
Theoretical Discussion ◽  
Multicusp Ion Source

Ion energy spread and current measurements of the rf-driven multicusp ion source

1997 ◽  
Vol 68 (3) ◽  
pp. 1398-1402 ◽  
Author(s):  
Y. Lee ◽  
R. A. Gough ◽  
W. B. Kunkel ◽  
K. N. Leung ◽  
L. T. Perkins ◽  
...  
Keyword(s):  
Ion Source ◽  
Energy Spread ◽  
Ion Energy ◽  
Multicusp Ion Source
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