Impact of the gas dynamics on the cluster flux in a magnetron cluster-source: Influence of the chamber shape and gas-inlet position
2006 ◽
Vol 6
(4)
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pp. 1140-1149
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Keyword(s):
1967 ◽
Vol 31
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pp. 117-119
Keyword(s):
2018 ◽
Vol 10
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pp. 5-29
2019 ◽
Vol 7
(5)
◽
pp. 1319-1322
Keyword(s):
Keyword(s):