Excimer laser liftoff of AlGaN/GaN HEMTs on thick AlN heat spreaders
2005 ◽
Vol 8
(12)
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pp. G352
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Keyword(s):
2013 ◽
Vol 28
(5)
◽
pp. 055010
◽
Keyword(s):
1998 ◽
Vol 31
(2)
◽
pp. 154A
◽
Keyword(s):
Keyword(s):
1995 ◽
Vol 9
(2)
◽
pp. 101
◽