Metastable defect states in hydrogen-implanted silicon
2011 ◽
Vol 50
(2R)
◽
pp. 020203
◽
Keyword(s):
2011 ◽
Vol 50
(2)
◽
pp. 020203
◽
Keyword(s):
1991 ◽
Vol 137-138
◽
pp. 287-290
◽
1997 ◽
Vol 239-241
◽
pp. 19-24
◽