scholarly journals A model-based clustering approach to the recognition of the spatial defect patterns produced during semiconductor fabrication

2007 ◽  
Vol 40 (2) ◽  
pp. 93-101 ◽  
Author(s):  
Tao Yuan ◽  
Way Kuo
2015 ◽  
Vol 133 ◽  
pp. 29-46 ◽  
Author(s):  
Kiran Vanbinst ◽  
Eva Ceulemans ◽  
Pol Ghesquière ◽  
Bert De Smedt

2014 ◽  
Vol 47 (3) ◽  
pp. 10713-10718
Author(s):  
Kening Jiang ◽  
Duan Li ◽  
Jianjun Gao ◽  
Jeffrey Xu YU

2017 ◽  
Vol 65 ◽  
pp. 442-457 ◽  
Author(s):  
Zsuzsanna Csereklyei ◽  
Paul W. Thurner ◽  
Johannes Langer ◽  
Helmut Küchenhoff

2017 ◽  
Author(s):  
Zsuzsanna Csereklyei ◽  
Paul W. Thurner ◽  
Johannes Langer ◽  
Helmut Kuchenhoff

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