Preparation and Characterizations of High-K (Ca, Sr)ZrO3 Gate Dielectric Thin Films by Sol-Gel Technology

2004 ◽  
Vol 61 (1) ◽  
pp. 25-35 ◽  
Author(s):  
W. ZHU ◽  
T. YU ◽  
C. H. CHEN ◽  
X. F. CHEN ◽  
R. G. KRISHNAN
Keyword(s):  
Thin Films ◽  
Gate Dielectric ◽  
Sol Gel ◽  
Dielectric Thin Films ◽  
High K

Two-step interfacial reaction of HfO2 high-k gate dielectric thin films on Si

2004 ◽  
Vol 30 (7) ◽  
pp. 1267-1270 ◽  
Author(s):  
P.F. Lee ◽  
J.Y. Dai ◽  
H.L.W. Chan ◽  
C.L. Choy
Keyword(s):  
Thin Films ◽  
Interfacial Reaction ◽  
Gate Dielectric ◽  
Dielectric Thin Films ◽  
High K ◽  
High K Gate Dielectric

Study of Hf—Al—O High-k Gate Dielectric Thin Films Grown on Si

2003 ◽  
Vol 57 (1) ◽  
pp. 1213-1219 ◽  
Author(s):  
P. F. Lee ◽  
J. Y. Dai ◽  
H. L. W. Chan ◽  
C. L. Choy
Keyword(s):  
Thin Films ◽  
Gate Dielectric ◽  
Dielectric Thin Films ◽  
High K ◽  
High K Gate Dielectric

Preparation and characterization of sol–gel derived CaZrO3 dielectric thin films for high-k applications

2004 ◽  
Vol 348 (1-4) ◽  
pp. 440-445 ◽  
Author(s):  
T. Yu ◽  
W.G. Zhu ◽  
C.H. Chen ◽  
X.F. Chen ◽  
R.Gopal Krishnan
Keyword(s):  
Thin Films ◽  
Sol Gel ◽  
Dielectric Thin Films ◽  
High K

Sol-gel derived TiNb2 O7 dielectric thin films for transparent electronic applications

2017 ◽  
Vol 101 (2) ◽  
pp. 674-682 ◽  
Author(s):  
Ming-Chuan Chang ◽  
Chieh-Szu Huang ◽  
Yi-Da Ho ◽  
Cheng-Liang Huang
Keyword(s):  
Thin Films ◽  
Sol Gel ◽  
Dielectric Thin Films
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