On the influence of energy transfer efficiency on the electron energy distribution function in HF sustained rare gas plasmas: experimental and numerical study
1993 ◽
Vol 26
(8)
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pp. 1230-1238
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2014 ◽
Vol 9
(0)
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pp. 1401011-1401011
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1977 ◽
Vol 27
(9)
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pp. 1027-1033
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1985 ◽
Vol 18
(3)
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pp. 347-358
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2003 ◽
Vol 42
(Part 1, No. 2A)
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pp. 657-662
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1987 ◽
Vol 20
(7)
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pp. 838-843
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2012 ◽
Vol 26
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pp. 279-287
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