On the influence of energy transfer efficiency on the electron energy distribution function in HF sustained rare gas plasmas: experimental and numerical study

1993 ◽  
Vol 26 (8) ◽  
pp. 1230-1238 ◽  
Author(s):  
U Kortshagen
2003 ◽  
Vol 42 (Part 1, No. 2A) ◽  
pp. 657-662 ◽  
Author(s):  
Kazuya Uehara ◽  
Akira Tsushima ◽  
Hiroshi Amemiya ◽  
Hisato Kawasima ◽  
Katsumichi Hoshino

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