Experimental results of a dc glow discharge source with controlled plasma floating potential for plasma immersion ion implantation

2000 ◽  
Vol 33 (13) ◽  
pp. 1592-1595 ◽  
Author(s):  
L A Berni ◽  
M Ueda ◽  
G F Gomes ◽  
A F Beloto ◽  
H Reuther
Keyword(s):  
Glow Discharge ◽  
Ion Implantation ◽  
Experimental Results ◽  
Floating Potential ◽  
Dc Glow Discharge ◽  
Discharge Source ◽  
Plasma Immersion Ion Implantation ◽  
Glow Discharge Source

Application of a dc glow discharge source with controlled plasma potential in plasma immersion ion implantation

1999 ◽  
Vol 86 (9) ◽  
pp. 4821-4824 ◽  
Author(s):  
M. Ueda ◽  
L. A. Berni ◽  
G. F. Gomes ◽  
A. F. Beloto ◽  
E. Abramof ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Ion Implantation ◽  
Plasma Potential ◽  
Dc Glow Discharge ◽  
Discharge Source ◽  
Plasma Immersion Ion Implantation ◽  
Glow Discharge Source

Hybrid evaporation: Glow discharge source for plasma immersion ion implantation

2003 ◽  
Vol 74 (10) ◽  
pp. 4301-4304 ◽  
Author(s):  
L. H. Li ◽  
R. W. Y. Poon ◽  
S. C. H. Kwok ◽  
P. K. Chu ◽  
Y. Q. Wu ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Ion Implantation ◽  
Discharge Source ◽  
Plasma Immersion Ion Implantation ◽  
Glow Discharge Source

Characterization of a Focal Plane Camera Fitted to a Mattauch−Herzog Geometry Mass Spectrograph. 1. Use with a Glow-Discharge Source

2002 ◽  
Vol 74 (20) ◽  
pp. 5327-5332 ◽  
Author(s):  
Barnes ◽  
Roger Sperline ◽  
M. Bonner Denton ◽  
Charles J. Barinaga ◽  
David Koppenaal ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Focal Plane ◽  
Discharge Source ◽  
Mass Spectrograph ◽  
Glow Discharge Source
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