Investigation of plasma potential and pulsed discharge characteristics in enhanced glow discharge plasma immersion ion implantation and deposition

2009 ◽  
Vol 267 (8-9) ◽  
pp. 1696-1700 ◽  
Author(s):  
Liuhe Li ◽  
Qiuyuan Lu ◽  
Ricky K.Y. Fu ◽  
Paul K. Chu
Keyword(s):  
Glow Discharge ◽  
Ion Implantation ◽  
Discharge Plasma ◽  
Plasma Potential ◽  
Glow Discharge Plasma ◽  
Pulsed Discharge ◽  
Discharge Characteristics ◽  
Plasma Immersion Ion Implantation

Impact energy and retained dose uniformity in enhanced glow discharge plasma immersion ion implantation

2009 ◽  
Vol 95 (6) ◽  
pp. 061503 ◽  
Author(s):  
Qiu Yuan Lu ◽  
Liu He Li ◽  
Jian Hui Li ◽  
Ricky K. Y. Fu ◽  
Paul K. Chu
Keyword(s):  
Glow Discharge ◽  
Ion Implantation ◽  
Impact Energy ◽  
Discharge Plasma ◽  
Glow Discharge Plasma ◽  
Dose Uniformity ◽  
Plasma Immersion Ion Implantation
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