Mode transitions in low pressure rare gas cylindrical ICP discharge studied by optical emission spectroscopy
2004 ◽
Vol 37
(20)
◽
pp. 2827-2840
◽
Keyword(s):
Rare Gas
◽
Keyword(s):
2011 ◽
Vol 13
(2)
◽
pp. 208-212
◽
Keyword(s):
1997 ◽
Vol 37
(6)
◽
pp. 483-497
◽
Keyword(s):
Keyword(s):
2001 ◽
Vol 34
(18)
◽
pp. 2854-2861
◽