Calibration of the scales of areal surface topography measuring instruments: part 2. Amplification, linearity and squareness

2012 ◽  
Vol 23 (6) ◽  
pp. 065005 ◽  
Author(s):  
Claudiu L Giusca ◽  
Richard K Leach ◽  
Frank Helery
Keyword(s):  
Surface Topography ◽  
Measuring Instruments ◽  
Areal Surface

Calibration of the scales of areal surface topography-measuring instruments: part 1. Measurement noise and residual flatness

2012 ◽  
Vol 23 (3) ◽  
pp. 035008 ◽  
Author(s):  
Claudiu L Giusca ◽  
Richard K Leach ◽  
Franck Helary ◽  
Tadas Gutauskas ◽  
Lakshmi Nimishakavi
Keyword(s):  
Surface Topography ◽  
Measurement Noise ◽  
Measuring Instruments ◽  
Areal Surface
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