Calibration of areal surface topography measuring instruments

Fifth International Conference on Optical and Photonics Engineering ◽

10.1117/12.2270533 ◽

2017 ◽

Author(s):

Jörg Seewig ◽

Matthias Eifler

Keyword(s):

Surface Topography ◽

Measuring Instruments ◽

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Calibration of the scales of areal surface topography measuring instruments: part 3. Resolution

Measurement Science and Technology ◽

10.1088/0957-0233/24/10/105010 ◽

2013 ◽

Vol 24 (10) ◽

pp. 105010 ◽

Author(s):

Claudiu L Giusca ◽

Richard K Leach

Keyword(s):

Surface Topography ◽

Measuring Instruments ◽

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Calibration of the scales of areal surface topography-measuring instruments: part 1. Measurement noise and residual flatness

Measurement Science and Technology ◽

10.1088/0957-0233/23/3/035008 ◽

2012 ◽

Vol 23 (3) ◽

pp. 035008 ◽

Author(s):

Claudiu L Giusca ◽

Richard K Leach ◽

Franck Helary ◽

Tadas Gutauskas ◽

Lakshmi Nimishakavi

Keyword(s):

Surface Topography ◽

Measurement Noise ◽

Measuring Instruments ◽

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User-oriented evaluation of the metrological characteristics of areal surface topography measuring instruments

Optical Measurement Systems for Industrial Inspection XI ◽

10.1117/12.2526005 ◽

2019 ◽

Author(s):

Matthias Eifler ◽

Felix Ströer ◽

Julian Hering ◽

Georg von Freymann ◽

Jörg Seewig

Keyword(s):

Surface Topography ◽

Metrological Characteristics ◽

Measuring Instruments ◽

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A novel material measure for characterising two-dimensional instrument transfer functions of areal surface topography measuring instruments

Surface Topography Metrology and Properties ◽

10.1088/2051-672x/abc9d2 ◽

2020 ◽

Vol 8 (4) ◽

pp. 045025

Author(s):

Gaoliang Dai ◽

Ziyang Jiao ◽

Lanting Xiang ◽

Benedikt Seeger ◽

Thomas Weimann ◽

...

Keyword(s):

Surface Topography ◽

Transfer Functions ◽

Measuring Instruments ◽

Two Dimensional ◽

Novel Material ◽

Material Measure ◽

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Calibration of the scales of areal surface topography measuring instruments: part 2. Amplification, linearity and squareness

Measurement Science and Technology ◽

10.1088/0957-0233/23/6/065005 ◽

2012 ◽

Vol 23 (6) ◽

pp. 065005 ◽

Author(s):

Claudiu L Giusca ◽

Richard K Leach ◽

Frank Helery

Keyword(s):

Surface Topography ◽

Measuring Instruments ◽

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Investigation of the measurement uncertainty in the 2D-instrument transfer function (ITF) characterization of areal surface topography measuring instruments

10.51202/9783181023907-361 ◽

2021 ◽

pp. 361-366

Author(s):

Z. Jiao ◽

G. Dai ◽

R. Tutsch

Keyword(s):

Transfer Function ◽

Measurement Uncertainty ◽

Surface Topography ◽

Measuring Instruments ◽

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Calibration of the geometrical characteristics of areal surface topography measuring instruments

Journal of Physics Conference Series ◽

10.1088/1742-6596/311/1/012005 ◽

2011 ◽

Vol 311 ◽

pp. 012005 ◽

Author(s):

C L Giusca ◽

R K Leach ◽

F Helery ◽

T Gutauskas

Keyword(s):

Surface Topography ◽

Measuring Instruments ◽

Geometrical Characteristics ◽

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Determination of the metrological characteristics of optical surface topography measuring instruments

10.1117/12.921452 ◽

2012 ◽

Author(s):

R. K. Leach ◽

C. L. Giusca

Keyword(s):

Surface Topography ◽

Metrological Characteristics ◽

Measuring Instruments ◽

Optical Surface

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Morphologic segmentation algorithms for extracting individual surface features from areal surface topography maps

Surface Topography Metrology and Properties ◽

10.1088/2051-672x/1/1/015005 ◽

2013 ◽

Vol 1 (1) ◽

pp. 015005 ◽

Author(s):

Nicola Senin ◽

Liam A Blunt ◽

Richard K Leach ◽

Stefano Pini

Keyword(s):

Surface Topography ◽

Surface Features ◽

Segmentation Algorithms ◽

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The use of areal surface topography analysis for the inspection of micro-fabricated thin foil laser targets for ion acceleration

Measurement Science and Technology ◽

10.1088/0957-0233/23/10/105004 ◽

2012 ◽

Vol 23 (10) ◽

pp. 105004 ◽

Author(s):

Nicola Senin ◽

Liam Blunt ◽

Martin Tolley

Keyword(s):

Surface Topography ◽

Thin Foil ◽

Ion Acceleration ◽

Topography Analysis ◽

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