Investigation of the measurement uncertainty in the 2D-instrument transfer function (ITF) characterization of areal surface topography measuring instruments

2021 ◽  
pp. 361-366
Author(s):  
Z. Jiao ◽  
G. Dai ◽  
R. Tutsch
Keyword(s):  
Transfer Function ◽  
Measurement Uncertainty ◽  
Surface Topography ◽  
Measuring Instruments ◽  
Areal Surface

Determination of the transfer function for optical surface topography measuring instruments—a review

2013 ◽  
Vol 24 (5) ◽  
pp. 052001 ◽  
Author(s):  
Matthew R Foreman ◽  
Claudiu L Giusca ◽  
Jeremy M Coupland ◽  
Peter Török ◽  
Richard K Leach
Keyword(s):  
Transfer Function ◽  
Surface Topography ◽  
Measuring Instruments ◽  
Optical Surface

Lagerung UP-gedrehter Kalibriernormale/Storage of UP-turned material measures – Influence of climatic conditions during storage on the properties of material measures

2020 ◽  
Vol 110 (11-12) ◽  
pp. 772-778
Author(s):  
Katja Klauer ◽  
Matthias Eifler ◽  
Jörg Hartig ◽  
Benjamin Kirsch ◽  
Jörg Seewig ◽  
...  
Keyword(s):  
Measurement Uncertainty ◽  
Surface Topography ◽  
Climatic Conditions ◽  
Measured Parameter ◽  
Measuring Instruments ◽  
Measuring Device ◽  
Optical Measuring ◽  
Different Temperatures

Kalibriernormale für Oberflächenmessgeräte müssen nach DIN 1319–1 den bekannten Wert einer Messgröße bewahren und reproduzieren, um eine Rückführung der gemessenen Größen sowie die Quantifizierung der Messunsicherheit zu erlauben. Im Rahmen der Untersuchungen wurden ultrapräzisionsgedrehte Kalibiernormale bei zwei unterschiedlichen Temperaturen und relativen Feuchten gelagert und anschließend sowohl mit einem taktilen als auch optischen Messgerät gemessen, um den Einfluss auf die Messgrößen zu beschreiben. According to DIN 1319–1 material measures for surface topography measuring instruments retain and reproduce a defined value of a measurand which enables the traceability of the measured parameter and the quantification of the measurement uncertainty. Within the present investigations, UP-turned material measures were stored at two different temperatures and relative humidities and subsequently measured with both a tactile and an optical measuring device to describe the influence on the measurands.

Calibration of the scales of areal surface topography-measuring instruments: part 1. Measurement noise and residual flatness

2012 ◽  
Vol 23 (3) ◽  
pp. 035008 ◽  
Author(s):  
Claudiu L Giusca ◽  
Richard K Leach ◽  
Franck Helary ◽  
Tadas Gutauskas ◽  
Lakshmi Nimishakavi
Keyword(s):  
Surface Topography ◽  
Measurement Noise ◽  
Measuring Instruments ◽  
Areal Surface
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