Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing: II. Device fabrication and characterization
2010 ◽
Vol 20
(12)
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pp. 125019
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2010 ◽
Vol 20
(12)
◽
pp. 125018
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2012 ◽
Vol 29
(3)
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pp. 225-234
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2006 ◽
Vol 20
(3)
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pp. 297-309
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Keyword(s):
2016 ◽
Vol 452
◽
pp. 49-53
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2004 ◽
Vol 13
(4)
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pp. 594-602
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2019 ◽
Vol 139
(11)
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pp. 375-380