Sensitivity enhancement of a micro-scale biomimetic tactile sensor with epidermal ridges

2010 ◽  
Vol 20 (12) ◽  
pp. 129801 ◽  
Author(s):  
Yuhua Zhang ◽  
Norihisa Miki
Keyword(s):  
Tactile Sensor ◽  
Sensitivity Enhancement ◽  
Micro Scale

Five-fold sensitivity enhancement in a capacitive tactile sensor by reducing material and structural rigidity

2019 ◽  
Vol 293 ◽  
pp. 167-177 ◽  
Author(s):  
Yu-Hong Gao ◽  
Yu-Hao Jen ◽  
Rongshun Chen ◽  
Kean Aw ◽  
Daisuke Yamane ◽  
...  
Keyword(s):  
Tactile Sensor ◽  
Sensitivity Enhancement ◽  
Structural Rigidity

CMOS-MEMS capacitive tactile sensor with vertically integrated sensing electrode array for sensitivity enhancement

2021 ◽  
Vol 317 ◽  
pp. 112350
Author(s):  
Meng-Lin Hsieh ◽  
Sheng-Kai Yeh ◽  
Jia-Horng Lee ◽  
Ming-Ching Cheng ◽  
Weileun Fang
Keyword(s):  
Electrode Array ◽  
Tactile Sensor ◽  
Sensitivity Enhancement ◽  
Cmos Mems
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