Vertically Integrated Multiple Electrode Design for Sensitivity Enhancement of CMOS-MEMS Capacitive Tactile Sensor

2019 ◽  
Author(s):  
Meng-Lin Hsieh ◽  
Sheng-Kai Yeh ◽  
Jia-Horng Lee ◽  
Pen-Sheng Lin ◽  
Mei-Feng Lai ◽  
...  
Keyword(s):  
Tactile Sensor ◽  
Sensitivity Enhancement ◽  
Electrode Design ◽  
Cmos Mems ◽  
Multiple Electrode

CMOS-MEMS capacitive tactile sensor with vertically integrated sensing electrode array for sensitivity enhancement

2021 ◽  
Vol 317 ◽  
pp. 112350
Author(s):  
Meng-Lin Hsieh ◽  
Sheng-Kai Yeh ◽  
Jia-Horng Lee ◽  
Ming-Ching Cheng ◽  
Weileun Fang
Keyword(s):  
Electrode Array ◽  
Tactile Sensor ◽  
Sensitivity Enhancement ◽  
Cmos Mems

A Highly Sensitive CMOS-MEMS Capacitive Tactile Sensor

2006 ◽  
Author(s):  
Cheng-Ting Ko ◽  
Jhy-Ping Wu ◽  
Wen-Chih Wang ◽  
Ching-Hsiao Huang ◽  
Sheng-Hsiang Tseng ◽  
...  
Keyword(s):  
Tactile Sensor ◽  
Highly Sensitive ◽  
Cmos Mems

Testing, Repairing and Packaging Technology for the CMOS-MEMS Integrated Tactile Sensor

2013 ◽  
Vol 133 (6) ◽  
pp. 243-249 ◽  
Author(s):  
Mitsutoshi Makihata ◽  
Masanori Muroyama ◽  
Yoshihiro Nakano ◽  
Takahiro Nakayama ◽  
Ui Yamaguchi ◽  
...  
Keyword(s):  
Tactile Sensor ◽  
Packaging Technology ◽  
Cmos Mems
Sign in / Sign up

Export Citation Format

Share Document