CMOS-MEMS capacitive tactile sensor with vertically integrated sensing electrode array for sensitivity enhancement

2021 ◽  
Vol 317 ◽  
pp. 112350
Author(s):  
Meng-Lin Hsieh ◽  
Sheng-Kai Yeh ◽  
Jia-Horng Lee ◽  
Ming-Ching Cheng ◽  
Weileun Fang
Keyword(s):  
Electrode Array ◽  
Tactile Sensor ◽  
Sensitivity Enhancement ◽  
Cmos Mems

A CMOS MEMS Gold Plated Electrode Array for Chemical Vapor Detection

2006 ◽  
Author(s):  
S.S. Bedair ◽  
Bo Li ◽  
J.R. Cooper ◽  
S. Santhanam ◽  
R.D. McCullough ◽  
...  
Keyword(s):  
Electrode Array ◽  
Chemical Vapor ◽  
Vapor Detection ◽  
Cmos Mems

A Highly Sensitive CMOS-MEMS Capacitive Tactile Sensor

2006 ◽  
Author(s):  
Cheng-Ting Ko ◽  
Jhy-Ping Wu ◽  
Wen-Chih Wang ◽  
Ching-Hsiao Huang ◽  
Sheng-Hsiang Tseng ◽  
...  
Keyword(s):  
Tactile Sensor ◽  
Highly Sensitive ◽  
Cmos Mems
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