Replication of nano/micro-scale features using bulk metallic glass mold prepared by femtosecond laser and imprint processes

2013 ◽  
Vol 23 (3) ◽  
pp. 035030 ◽  
Author(s):  
Y C Chen ◽  
J P Chu ◽  
J S C Jang ◽  
C W Hsieh ◽  
Y Yang ◽  
...  
2007 ◽  
Vol 539-543 ◽  
pp. 1951-1954 ◽  
Author(s):  
Tomokazu Sano ◽  
Kengo Takahashi ◽  
Akio Hirose ◽  
Kojiro F. Kobayashi

Dependence of the femtosecond laser ablation depth on the laser pulse energy was investigated for Zr55Al10Ni5Cu30 bulk metallic glass. Investigation of the femtosecond laser ablation of bulk metallic glasses has not been reported. Femtosecond laser pulses (wavelength of 800 nm, pulse width of 100 fs, pulse energies of 2 – 900 μJ) were focused and irradiated on the polished surface of metals in air. The ablation depth of the metallic glass is deeper than that of its crystallized metal at a pulse energy in the strong ablation region. We suggest that the energy loss at grain boundaries of hot electrons which is accelerated by the laser electric field influence the ablation depth in the strong ablation region.


2013 ◽  
Vol 30 (3) ◽  
pp. 036201 ◽  
Author(s):  
Yan-Peng Wei ◽  
Bing-Chen Wei ◽  
Xi Wang ◽  
Guang-Yue Xu ◽  
Lei Li ◽  
...  

2014 ◽  
Vol 21 (7) ◽  
pp. 1453-1457 ◽  
Author(s):  
Xiang Zhang ◽  
Jiang Ma ◽  
Ge Fang ◽  
Bingli Sun ◽  
Junfeng Li ◽  
...  

2019 ◽  
Vol 59 (11) ◽  
pp. 2202-2210
Author(s):  
Xiang Zhang ◽  
Zhenxing Wang ◽  
Haotong Li ◽  
Chuanyu Hou ◽  
Xiaoya Kong ◽  
...  

2011 ◽  
Vol 39 (5) ◽  
pp. 347-353 ◽  
Author(s):  
Togo SHINONAGA ◽  
Masahiro TSUKAMOTO ◽  
Sayaka MARUYAMA ◽  
Nobuhiro MATSUSHITA ◽  
Takeshi WADA ◽  
...  

2012 ◽  
Vol 510 ◽  
pp. 639-644 ◽  
Author(s):  
Xiang Zhang ◽  
Jiang Ma ◽  
Ran Bai ◽  
Qian Li ◽  
Bing Li Sun ◽  
...  

Polymer microstructures are used more and more in many fields. Hot embossing is one of molding processing to achieve micro polymer components. In this paper, bulk metallic glass was selected as mold material to fabricate mold insert of micro hot embossing. Traditional UV-lithography and ICP-etching were used to achieve micro features on silicon wafer. And then, micro features were transferred from silicon wafer to bulk metallic glass mold insert above its glass transition temperature. Finally, applied bulk metallic glass mold insert to replicate polymer microstructure with hot embossing. Three commonly used thermoplastic polymers: high-density polyethylene (HDPE), polypropylene (PP) and polycarbonate (PC) were selected in this study. Experiments show that microstructures can have a good replication from bulk metallic glass mold insert to the thermoplastic polymer using hot embossing.


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