Determination of the electron energy distribution function via optical emission spectroscopy and a Langmuir probe in an ICP
2008 ◽
Vol 17
(3)
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pp. 035004
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2012 ◽
Vol 45
(47)
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pp. 475202
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1990 ◽
Vol 29
(Part 1, No. 10)
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pp. 2139-2144
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2013 ◽
Vol 53
(1)
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pp. 45-50
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1989 ◽
Vol 38
(4)
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pp. 300-303
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2009 ◽
Vol 55
(5(1))
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pp. 1825-1835
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1978 ◽
Vol 28
(9)
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pp. 985-988
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2009 ◽
Vol 51
(6)
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pp. 065014
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