Spot patterns and instabilities in a pulsed low-pressure rf glow discharge

2014 ◽  
Vol 23 (5) ◽  
pp. 054009 ◽  
Author(s):  
M Voronov ◽  
V Hoffmann ◽  
T Steingrobe ◽  
W Buscher ◽  
C Engelhard ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Low Pressure ◽  
Rf Glow Discharge

Ion kinetics in low-pressure, electropositive, RF glow discharge sheaths

1991 ◽  
Vol 19 (2) ◽  
pp. 240-244 ◽  
Author(s):  
M.S. Barnes ◽  
J.C. Forster ◽  
J.H. Keller
Keyword(s):  
Glow Discharge ◽  
Low Pressure ◽  
Rf Glow Discharge

Decomposition Process of Benzene in a Low Pressure DC Glow Discharge

2010 ◽  
Vol 130 (11) ◽  
pp. 1004-1008
Author(s):  
Shinobu Hayashi ◽  
Kohki Satoh ◽  
Hidenori Itoh
Keyword(s):  
Glow Discharge ◽  
Low Pressure ◽  
Decomposition Process ◽  
Dc Glow Discharge

Decomposition Characteristics of an Artificial Biogas in a Low-Pressure DC Glow Discharge

2011 ◽  
Vol 131 (9) ◽  
pp. 757-763
Author(s):  
Yasuhiro Itoh ◽  
Takamasa Oshita ◽  
Kohki Satoh ◽  
Hidenori Itoh
Keyword(s):  
Glow Discharge ◽  
Low Pressure ◽  
Dc Glow Discharge

Current-voltage characteristics of aluminium nitride films formed by RF glow discharge

1980 ◽  
Vol 13 (6) ◽  
pp. L101-L105 ◽  
Author(s):  
D Mangalaraj ◽  
M Radhakrishnan ◽  
C Balasubramanian ◽  
A R Kasilingam
Keyword(s):  
Glow Discharge ◽  
Aluminium Nitride ◽  
Current Voltage ◽  
Rf Glow Discharge ◽  
Current Voltage Characteristics

Microcrystalline Silicon Films Deposited by Cathode‐Type RF Glow Discharge Technique

1995 ◽  
Vol 142 (5) ◽  
pp. 1663-1666 ◽  
Author(s):  
Ahalapitiya Hewage Jayatissa ◽  
Yoichiro Nakanishi ◽  
Yosinori Hatanaka
Keyword(s):  
Glow Discharge ◽  
Silicon Films ◽  
Microcrystalline Silicon ◽  
Rf Glow Discharge
Sign in / Sign up

Export Citation Format

Share Document