Very low pressure RF glow discharge plasma using multi-dipole surface magnetic fields

Author(s):  
N. Hershkowitz ◽  
M.H. Cho ◽  
A. Wendt ◽  
J. Pruski
2006 ◽  
Vol 506-507 ◽  
pp. 259-262 ◽  
Author(s):  
T. Kaneko ◽  
H. Matsuoka ◽  
T. Hirata ◽  
R. Hatakeyama ◽  
K. Tohji

Sign in / Sign up

Export Citation Format

Share Document