Ion kinetics in low-pressure, electropositive, RF glow discharge sheaths
1991 ◽
Vol 19
(2)
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pp. 240-244
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Keyword(s):
2014 ◽
Vol 23
(5)
◽
pp. 054009
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2010 ◽
Vol 130
(11)
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pp. 1004-1008
2011 ◽
Vol 131
(9)
◽
pp. 757-763
1997 ◽
Vol 6
(3)
◽
pp. 361-372
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1980 ◽
Vol 13
(6)
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pp. L101-L105
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Keyword(s):
1995 ◽
Vol 142
(5)
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pp. 1663-1666
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