Hierarchy of models for electrostatic comb-drive actuators in electrolytes

2018 ◽  
Vol 28 (12) ◽  
pp. 125013 ◽  
Author(s):  
Ohiremen L Dibua ◽  
Sheetal Ramsurrun ◽  
Ali Mani ◽  
Beth L Pruitt ◽  
Gianluca Iaccarino
Keyword(s):  
Comb Drive ◽  
Hierarchy Of Models

An Equivalent Circuit Model for Vertical Comb Drive MEMS Optical Scanner Controlled by Pulse Width Modulation

2012 ◽  
Vol 132 (1) ◽  
pp. 1-9 ◽  
Author(s):  
Satoshi Maruyama ◽  
Muneki Nakada ◽  
Makoto Mita ◽  
Takuya Takahashi ◽  
Hiroyuki Fujita ◽  
...  
Keyword(s):  
Equivalent Circuit ◽  
Pulse Width ◽  
Pulse Width Modulation ◽  
Equivalent Circuit Model ◽  
Circuit Model ◽  
Comb Drive ◽  
Optical Scanner

scholarly journals Precise phase control of resonant MOEMS mirrors by comb-drive current feedback

Mechatronics ◽  
2020 ◽  
Vol 71 ◽  
pp. 102420
Author(s):  
David Brunner ◽  
Han Woong Yoo ◽  
Georg Schitter
Keyword(s):  
Phase Control ◽  
Comb Drive ◽  
Current Feedback ◽  
Drive Current

Analysis of the “Push–pull” Capacitance Bridge Circuit for Comb-Drive Micro-electro-mechanical Oscillators

2015 ◽  
Vol 183 (3-4) ◽  
pp. 313-319 ◽  
Author(s):  
P. Zheng ◽  
W. G. Jiang ◽  
C. S. Barquist ◽  
Y. Lee ◽  
H. B. Chan
Keyword(s):  
Bridge Circuit ◽  
Comb Drive ◽  
Capacitance Bridge ◽  
Mechanical Oscillators

Comb-Drive XYZ-microstage With Large Displacements Based on Chip-Level Microassembly

2016 ◽  
Vol 25 (6) ◽  
pp. 989-998 ◽  
Author(s):  
Gaopeng Xue ◽  
Masaya Toda ◽  
Takahito Ono
Keyword(s):  
Large Displacements ◽  
Comb Drive ◽  
On Chip

Stiction Failure Mechanisms of the Micromachined Electrostatic Comb-Drive Structures

2011 ◽  
Vol 80-81 ◽  
pp. 850-854
Author(s):  
Yi Shen Xu ◽  
Ji Hua Gu ◽  
Zhi Tao
Keyword(s):  
Failure Modes ◽  
Failure Mechanisms ◽  
Mems Devices ◽  
Comb Drive ◽  
Interfacial Forces ◽  
Restoring Forces ◽  
Critical Investigation

Stiction is one of the most important and almost unavoidable problems in MEMS, which usually occurs when the restoring forces of the microstructures are unable to overcome the interfacial forces. Stiction could compromise the performance and reliability of the MEMS devices or may even make them malfunction. One of the pivotal process of advancing the performance and reliability of MEMS is to comprehend the failure modes and failure mechanisms of these microdevices. This article provides a critical investigation on the stiction failure mechanisms of the micromachined electrostatic comb-drive structures, which is significant to improve the reliability of microdevices, especially for microfilters, microgrippers, microaccelerometers, microgyroscopes, microrelays, and so on.

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