A Monolithic Si-Micromachined 4-Stage Knudsen Pump for µGC Applications

Author(s):  
Tsenguun Byambadorj ◽  
Qisen Cheng ◽  
Yutao Qin ◽  
Yogesh B Gianchandani
Keyword(s):  
2017 ◽  
Vol 2 (3) ◽  
Author(s):  
Tobias Baier ◽  
Steffen Hardt ◽  
Vahid Shahabi ◽  
Ehsan Roohi

2020 ◽  
Vol 1560 ◽  
pp. 012061
Author(s):  
Kloss Yu Yu ◽  
F G Tcheremissine ◽  
M Yu Shirkin ◽  
I V Govorun ◽  
V Shirokovskaya Yu

2012 ◽  
Vol 22 (10) ◽  
pp. 105026 ◽  
Author(s):  
Naveen K Gupta ◽  
Seungdo An ◽  
Yogesh B Gianchandani
Keyword(s):  
On Chip ◽  

2013 ◽  
Vol 2013 (0) ◽  
pp. _J053035-1-_J053035-4
Author(s):  
Osamu MABUCHI ◽  
Hiroki YAMAGUCHI ◽  
Yu MATSUDA ◽  
Tomohide NIIMI
Keyword(s):  

2014 ◽  
Vol 25 (11) ◽  
pp. 1450061 ◽  
Author(s):  
Qiang Sheng ◽  
Gui-Hua Tang ◽  
Xiao-Jun Gu ◽  
David R. Emerson ◽  
Yong-Hao Zhang

Nonequilibrium thermal transpiration flow is numerically analyzed by an extended thermodynamic approach, a high-order moment method. The captured velocity profiles of temperature-driven flow in a parallel microchannel and in a micro-chamber are compared with available kinetic data or direct simulation Monte Carlo (DSMC) results. The advantages of the high-order moment method are shown as a combination of more accuracy than the Navier–Stokes–Fourier (NSF) equations and less computation cost than the DSMC method. In addition, the high-order moment method is also employed to simulate the thermal transpiration flow in complex geometries in two types of Knudsen pumps. One is based on micro-mechanized channels, where the effect of different wall temperature distributions on thermal transpiration flow is studied. The other relies on porous structures, where the variation of flow rate with a changing porosity or pore surface area ratio is investigated. These simulations can help to optimize the design of a real Knudsen pump.


2019 ◽  
Author(s):  
S. Tamura ◽  
H. Sugimoto ◽  
M. Yashima

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