Fabrication and characterization of a dynamically flat high resolution micro-scanner
2008 ◽
Vol 10
(4)
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pp. 044005
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2012 ◽
Vol 59
(4)
◽
pp. 1504-1509
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Keyword(s):
2011 ◽
Vol 649
(1)
◽
pp. 156-159
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