Fabrication and characterization of high-resolution AFM tips with high-quality double-wall carbon nanotubes

2006 ◽  
Vol 429 (4-6) ◽  
pp. 581-585 ◽  
Author(s):  
Shota Kuwahara ◽  
Seiji Akita ◽  
Masashi Shirakihara ◽  
Toshiki Sugai ◽  
Yoshikazu Nakayama ◽  
...  
Author(s):  
Mary Gopanchuk ◽  
Mohamed Arabi ◽  
N. Nelson-Fitzpatrick ◽  
Majed S. Al-Ghamdi ◽  
Eihab Abdel-Rahman ◽  
...  

This paper reports on the design, fabrication, and characterization of non-interdigitated comb drive actuators in Silicon-on-Insulator (SOI) wafers, using a single mask surface microma-chining process. The response of the actuator is analyzed numerically and experimentally. The results show at the fundamental frequency; it behaves as a longitudinal comb drive actuator. At a higher frequency, it exhibits a high-quality factor which is appropriate for sensor applications.


2018 ◽  
Vol 18 (6) ◽  
pp. 4040-4046 ◽  
Author(s):  
Li Shi ◽  
Yu Bai ◽  
Yu-Long Bai ◽  
Wen Ma ◽  
Juan Su

2014 ◽  
Vol 35 (1) ◽  
pp. 126-128 ◽  
Author(s):  
Ke Qu ◽  
Wei Lei ◽  
Chi Li ◽  
Yunsong Di ◽  
Jing Chen ◽  
...  

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