Nanofabrication of 50 nm zone plates through e-beam lithography with local proximity effect correction for x-ray imaging

2020 ◽  
Vol 29 (4) ◽  
pp. 047501 ◽  
Author(s):  
Jingyuan Zhu ◽  
Sichao Zhang ◽  
Shanshan Xie ◽  
Chen Xu ◽  
Lijuan Zhang ◽  
...  
Keyword(s):  
Proximity Effect ◽  
X Ray ◽  
Zone Plates ◽  
X Ray Imaging ◽  
Proximity Effect Correction ◽  
Local Proximity

APD-based x-ray imaging telescope using Fresnel zone plates for extremely high spatial resolution

2005 ◽  
Author(s):  
Michael R. Squillante ◽  
Richard A. Myers ◽  
Mitchell Woodring ◽  
James F. Christian ◽  
Frank Robertson ◽  
...  
Keyword(s):  
Spatial Resolution ◽  
High Spatial Resolution ◽  
Fresnel Zone ◽  
Fresnel Zone Plates ◽  
X Ray ◽  
Zone Plates ◽  
X Ray Imaging ◽  
Imaging Telescope

Progress on multi-order hard x-ray imaging with multilayer zone plates

2015 ◽  
Author(s):  
Markus Osterhoff ◽  
Florian Döring ◽  
Christian Eberl ◽  
Robin Wilke ◽  
Jesper Wallentin ◽  
...  
Keyword(s):  
X Ray ◽  
Zone Plates ◽  
X Ray Imaging

A Simplified Fabrication Process of Fresnel Zone Plates with Controlling Proximity Effect Correction

2011 ◽  
Vol 11 (1) ◽  
pp. 503-506
Author(s):  
Sang Chul Jeon ◽  
Deuk Su Kim ◽  
Ki Nam Kim ◽  
Kyung Min Kim ◽  
Chang Ho Seo ◽  
...  
Keyword(s):  
Proximity Effect ◽  
Fresnel Zone ◽  
Fabrication Process ◽  
Fresnel Zone Plates ◽  
Zone Plates ◽  
Proximity Effect Correction

Proximity Effect Correction for X-Ray Mask Fabrication

1994 ◽  
Vol 33 (Part 1, No. 12B) ◽  
pp. 6983-6988 ◽  
Author(s):  
Youichi Kuriyama ◽  
Shigeru Moriya ◽  
Shingo Uchiyama ◽  
Nobuo Shimazu
Keyword(s):  
Proximity Effect ◽  
X Ray ◽  
Proximity Effect Correction ◽  
Mask Fabrication

Validity of Double and Triple Gaussian Functions for Proximity Effect Correction in X-ray Mask Writing

1996 ◽  
Vol 35 (Part 1, No. 3) ◽  
pp. 1929-1936 ◽  
Author(s):  
Sunao Aya ◽  
Koji Kise ◽  
Hideki Yabe ◽  
Kenji Marumoto
Keyword(s):  
Proximity Effect ◽  
X Ray ◽  
Gaussian Functions ◽  
Proximity Effect Correction

Nanofabrication of 30 nm Au zone plates by e-beam lithography and pulse voltage electroplating for soft x-ray imaging

2020 ◽  
Vol 225 ◽  
pp. 111254 ◽  
Author(s):  
Jingyuan Zhu ◽  
Yifang Chen ◽  
Shanshan Xie ◽  
Lijuan Zhang ◽  
Chunpeng Wang ◽  
...  
Keyword(s):  
Pulse Voltage ◽  
X Ray ◽  
Zone Plates ◽  
X Ray Imaging
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