Proximity Effect Correction for X-Ray Mask Fabrication

1994 ◽  
Vol 33 (Part 1, No. 12B) ◽  
pp. 6983-6988 ◽  
Author(s):  
Youichi Kuriyama ◽  
Shigeru Moriya ◽  
Shingo Uchiyama ◽  
Nobuo Shimazu
Keyword(s):  
Proximity Effect ◽  
X Ray ◽  
Proximity Effect Correction ◽  
Mask Fabrication

Proximity Effect Correction for 1:1 X-Ray Mask Fabrication

1994 ◽  
Vol 33 (Part 1, No. 12B) ◽  
pp. 6976-6982
Author(s):  
Sunao Aya ◽  
Kouichi Moriizumi ◽  
Takeshi Fujino ◽  
Kinya Kamiyama ◽  
Hiroyuki Minami ◽  
...  
Keyword(s):  
Proximity Effect ◽  
X Ray ◽  
Proximity Effect Correction ◽  
Mask Fabrication

Validity of Double and Triple Gaussian Functions for Proximity Effect Correction in X-ray Mask Writing

1996 ◽  
Vol 35 (Part 1, No. 3) ◽  
pp. 1929-1936 ◽  
Author(s):  
Sunao Aya ◽  
Koji Kise ◽  
Hideki Yabe ◽  
Kenji Marumoto
Keyword(s):  
Proximity Effect ◽  
X Ray ◽  
Gaussian Functions ◽  
Proximity Effect Correction

Nanofabrication of 50 nm zone plates through e-beam lithography with local proximity effect correction for x-ray imaging

2020 ◽  
Vol 29 (4) ◽  
pp. 047501 ◽  
Author(s):  
Jingyuan Zhu ◽  
Sichao Zhang ◽  
Shanshan Xie ◽  
Chen Xu ◽  
Lijuan Zhang ◽  
...  
Keyword(s):  
Proximity Effect ◽  
X Ray ◽  
Zone Plates ◽  
X Ray Imaging ◽  
Proximity Effect Correction ◽  
Local Proximity

Fabrication of Si photonic waveguides by electron beam lithography using improved proximity effect correction

2020 ◽  
Vol 59 (12) ◽  
pp. 126502
Author(s):  
Moataz Eissa ◽  
Takuya Mitarai ◽  
Tomohiro Amemiya ◽  
Yasuyuki Miyamoto ◽  
Nobuhiko Nishiyama
Keyword(s):  
Electron Beam ◽  
Proximity Effect ◽  
Electron Beam Lithography ◽  
Photonic Waveguides ◽  
Proximity Effect Correction

A study of proximity effects at high electron-beam voltages for x-ray mask fabrication part 1: Additive mask processes

1991 ◽  
Vol 13 (1-4) ◽  
pp. 165-172 ◽  
Author(s):  
M.G. Rosenfield ◽  
S.A. Rishton ◽  
D.P. Kern ◽  
D.E. Seeger ◽  
C.A. Whiting
Keyword(s):  
Electron Beam ◽  
Proximity Effects ◽  
High Electron ◽  
X Ray ◽  
Mask Fabrication

Proximity effect correction for reticle fabrication

2000 ◽  
Author(s):  
Masao Sugiyama ◽  
Shinji Kubo ◽  
Koji Hiruta ◽  
Takayuki Iwamatsu ◽  
Tatsuya Fujisawa ◽  
...  
Keyword(s):  
Proximity Effect ◽  
Proximity Effect Correction
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